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Inventor
YANAGITA TOMOKO
JP
2 patents
⚠️ This page may combine multiple inventors who share the name “YANAGITA TOMOKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
1 patent
US9786494B2
Oct 10, 2017
Film formation method and film formation apparatus
TOKYO ELECTRON LTD
0 citations
36
L'Air Liquide Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude
1 patent
US9856269B2
Jan 2, 2018
Method for producing pyromellitic dianhydride, pyromellitic dianhydride produced by the method, and apparatus therefor
L'Air Liquide Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude
0 citations
35