Inventor
Noda yasuaki
JP11 patents
Patents
11 patentsUS10381221B2Aug 13, 2019
Substrate processing method, substrate processing apparatus and a computer-readable storage medium
TOKYO ELECTRON LTD3 citations71
US10707109B2Jul 7, 2020
Substrate processing apparatus
TOKYO ELECTRON LTD2 citations70
US8356951B2Jan 22, 2013
Wet-processing apparatus
TOKYO ELECTRON LTD5 citations70
US12501004B2Dec 16, 2025
Substrate imaging apparatus
TOKYO ELECTRON LTD0 citations62
US11832026B2Nov 28, 2023
Substrate imaging apparatus
TOKYO ELECTRON LTD0 citations62
US10958879B2Mar 23, 2021
Substrate imaging apparatus
TOKYO ELECTRON LTD0 citations62
US12557608B2Feb 17, 2026
Processing apparatus for forming a coating film on a substrate having a camera and a mirror member
TOKYO ELECTRON LTD0 citations61
US11791162B2Oct 17, 2023
Processing apparatus for forming a coating film on a substrate having a camera and a mirror member
TOKYO ELECTRON LTD0 citations61
US10523905B2Dec 31, 2019
Substrate imaging apparatus
TOKYO ELECTRON LTD0 citations51
US11555691B2Jan 17, 2023
Substrate inspection system, substrate inspection method and recording medium
TOKYO ELECTRON LTD0 citations50
US11378388B2Jul 5, 2022
Substrate inspection method, substrate inspection apparatus and recording medium
TOKYO ELECTRON LTD0 citations48