Inventor
CHAN ANTHONY CHIH-TUNG
US8 patents
Patents
8 patentsUSD933726SOct 19, 2021
Deposition ring for a semiconductor processing chamber
APPLIED MATERIALS INC40 citations92
US11846013B2Dec 19, 2023
Methods and apparatus for extended chamber for through silicon via deposition
APPLIED MATERIALS INC2 citations71
US12112890B2Oct 8, 2024
Top magnets for decreased non-uniformity in PVD
APPLIED MATERIALS INC0 citations59
US12136544B2Nov 5, 2024
Etch uniformity improvement for single turn internal coil PVD chamber
APPLIED MATERIALS INC0 citations56
US12322573B2Jun 3, 2025
Pulsing plasma treatment for film densification
APPLIED MATERIALS INC0 citations51
US11581166B2Feb 14, 2023
Low profile deposition ring for enhanced life
APPLIED MATERIALS INC0 citations50
US11295938B2Apr 5, 2022
Multi-radius magnetron for physical vapor deposition (PVD) and methods of use thereof
APPLIED MATERIALS INC0 citations50
US7767572B2Aug 3, 2010
Methods of forming a barrier layer in an interconnect structure
APPLIED MATERIALS INC1 citations50