Inventor
WYSOK IRENA H
US7 patents
Patents
7 patentsUSD933726SOct 19, 2021
Deposition ring for a semiconductor processing chamber
APPLIED MATERIALS INC40 citations92
US11846013B2Dec 19, 2023
Methods and apparatus for extended chamber for through silicon via deposition
APPLIED MATERIALS INC2 citations71
US12338527B2Jun 24, 2025
Shutter disk for physical vapor deposition (PVD) chamber
APPLIED MATERIALS INC0 citations61
US11898236B2Feb 13, 2024
Methods and apparatus for processing a substrate
APPLIED MATERIALS INC1 citations60
US11189472B2Nov 30, 2021
Cathode assembly having a dual position magnetron and centrally fed coolant
APPLIED MATERIALS INC0 citations56
US11581166B2Feb 14, 2023
Low profile deposition ring for enhanced life
APPLIED MATERIALS INC0 citations50
US11295938B2Apr 5, 2022
Multi-radius magnetron for physical vapor deposition (PVD) and methods of use thereof
APPLIED MATERIALS INC0 citations50