Inventor
AHR BRIAN
US8 patents
⚠️ This page may combine multiple inventors who share the name “AHR BRIAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
4 patentsUS9544984B2Jan 10, 2017
System and method for generation of extreme ultraviolet light
KLA TENCOR CORP10 citations82
US10021773B2Jul 10, 2018
Laser produced plasma light source having a target material coated on a cylindrically-symmetric element
KLA TENCOR CORP4 citations71
US10893599B2Jan 12, 2021
Laser produced plasma light source having a target material coated on a cylindrically-symmetric element
KLA TENCOR CORP0 citations61
US10880979B2Dec 29, 2020
Droplet generation for a laser produced plasma light source
KLA TENCOR CORP1 citations61
KLA CORP
4 patentsUS11419202B2Aug 16, 2022
Laser produced plasma light source having a target material coated on a cylindrically-symmetric element
KLA CORP0 citations61
US11343899B2May 24, 2022
Droplet generation for a laser produced plasma light source
KLA CORP0 citations61
US12418972B2Sep 16, 2025
Confocal chromatic metrology for EUV source condition monitoring
KLA CORP0 citations52
US11635700B2Apr 25, 2023
Method and apparatus for EUV mask inspection
KLA CORP0 citations46