Inventor
CHILESE FRANK
US16 patents
⚠️ This page may combine multiple inventors who share the name “CHILESE FRANK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
9 patentsUS9544984B2Jan 10, 2017
System and method for generation of extreme ultraviolet light
KLA TENCOR CORP10 citations82
US9448343B2Sep 20, 2016
Segmented mirror apparatus for imaging and method of using the same
KLA TENCOR CORP8 citations82
US9810991B2Nov 7, 2017
System and method for cleaning EUV optical elements
KLA TENCOR CORP5 citations72
US10021773B2Jul 10, 2018
Laser produced plasma light source having a target material coated on a cylindrically-symmetric element
KLA TENCOR CORP4 citations71
US10438769B1Oct 8, 2019
Array-based characterization tool
KLA TENCOR CORP2 citations68
US10893599B2Jan 12, 2021
Laser produced plasma light source having a target material coated on a cylindrically-symmetric element
KLA TENCOR CORP0 citations61
US9348214B2May 24, 2016
Spectral purity filter and light monitor for an EUV reticle inspection system
KLA TENCOR CORP2 citations61
US10777377B2Sep 15, 2020
Multi-column spacing for photomask and reticle inspection and wafer print check verification
KLA TENCOR CORP0 citations41
US9759912B2Sep 12, 2017
Particle and chemical control using tunnel flow
KLA TENCOR CORP0 citations41