P

Inventor

PLETTNER TOMAS

US12 patents
⚠️ This page may combine multiple inventors who share the name “PLETTNER TOMAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR CORP

5 patents
US9513230B2Dec 6, 2016

Apparatus and method for optical inspection, magnetic field and height mapping

KLA TENCOR CORP3 citations71
US10354832B2Jul 16, 2019

Multi-column scanning electron microscopy system

KLA TENCOR CORP3 citations69
US9418819B2Aug 16, 2016

Asymmetrical detector design and methodology

KLA TENCOR CORP2 citations61
US10211021B2Feb 19, 2019

Permanent-magnet particle beam apparatus and method incorporating a non-magnetic metal portion for tunability

KLA TENCOR CORP0 citations44
US10840056B2Nov 17, 2020

Multi-column scanning electron microscopy system

KLA TENCOR CORP0 citations34

KLA CORP

3 patents
US11927549B2Mar 12, 2024

Shielding strategy for mitigation of stray field for permanent magnet array

KLA CORP0 citations58
US11615939B2Mar 28, 2023

Shaped aperture set for multi-beam array configurations

KLA CORP0 citations57
US12014895B2Jun 18, 2024

Multi-beam electronics scan

KLA CORP0 citations50

PLETTNER TOMAS

2 patents
US9053833B2Jun 9, 2015

DC high-voltage super-radiant free-electron based EUV source

PLETTNER TOMAS6 citations69
US8618513B2Dec 31, 2013

Apparatus and methods for forming an electrical conduction path through an insulating layer

PLETTNER TOMAS4 citations59

UNIV LELAND STANFORD JUNIOR

1 patent
US7994472B2Aug 9, 2011

Laser-driven deflection arrangements and methods involving charged particle beams

UNIV LELAND STANFORD JUNIOR19 citations92

NASSER-GHODSI MEHRAN

1 patent
US8513619B1Aug 20, 2013

Non-planar extractor structure for electron source

NASSER-GHODSI MEHRAN20 citations89