Inventor
DEUTSCH THOMAS F
US4 patents
⚠️ This page may combine multiple inventors who share the name “DEUTSCH THOMAS F”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MASSACHUSETTS INST TECHNOLOGY
3 patentsUS4615904AOct 7, 1986
Maskless growth of patterned films
MASSACHUSETTS INST TECHNOLOGY53 citations94
US4340617AJul 20, 1982
Method and apparatus for depositing a material on a surface
MASSACHUSETTS INST TECHNOLOGY133 citations94
US4608117AAug 26, 1986
Maskless growth of patterned films
MASSACHUSETTS INST TECHNOLOGY42 citations90