Inventor
ITOH FUMIKAZU
JP20 patents
Patents
20 patentsUS5055696AOct 8, 1991
Multilayered device micro etching method and system
HITACHI LTD207 citations99
US6753253B1Jun 22, 2004
Method of making wiring and logic corrections on a semiconductor device by use of focused ion beams
HITACHI LTD97 citations98
US5656811AAug 12, 1997
Method for making specimen and apparatus thereof
HITACHI LTD138 citations98
US4983540AJan 8, 1991
Method of manufacturing devices having superlattice structures
HITACHI LTD123 citations98
US5825035AOct 20, 1998
Processing method and apparatus using focused ion beam generating means
HITACHI LTD140 citations97
US5683547ANov 4, 1997
Processing method and apparatus using focused energy beam
HITACHI LTD156 citations97
US5583344ADec 10, 1996
Process method and apparatus using focused ion beam generating means
HITACHI LTD73 citations96
US5504340AApr 2, 1996
Process method and apparatus using focused ion beam generating means
HITACHI LTD94 citations96
US5358806AOct 25, 1994
Phase shift mask, method of correcting the same and apparatus for carrying out the method
HITACHI LTD70 citations96
US5223109AJun 29, 1993
Ion beam processing method and apparatus
HITACHI LTD52 citations96
US5113072AMay 12, 1992
Device having superlattice structure, and method of and apparatus for manufacturing the same
HITACHI LTD48 citations96
US5086015AFeb 4, 1992
Method of etching a semiconductor device by an ion beam
HITACHI LTD75 citations96
US5447614ASep 5, 1995
Method of processing a sample using a charged beam and reactive gases and system employing the same
HITACHI LTD31 citations92
US5439763AAug 8, 1995
Optical mask and method of correcting the same
HITACHI LTD24 citations92
US5342448AAug 30, 1994
Apparatus for processing a sample using a charged beam and reactive gases
HITACHI LTD39 citations92
US5229607AJul 20, 1993
Combination apparatus having a scanning electron microscope therein
HITACHI LTD47 citations92
US5026664AJun 25, 1991
Method of providing a semiconductor IC device with an additional conduction path
HITACHI LTD35 citations92
US4449293AMay 22, 1984
Coil winding and inserting machine
HITACHI LTD14 citations73
US4184644AJan 22, 1980
Winding machine
HITACHI LTD11 citations72
US4299023ANov 10, 1981
Machine for winding and inserting coils
HITACHI LTD10 citations71