Inventor

CHU TSU-YU

TW6 patents

⚠️ This page may combine multiple inventors who share the name “CHU TSU-YU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG

4 patents

US6346366B1Feb 12, 2002

Method for making an advanced guard ring for stacked film using a novel mask design

TAIWAN SEMICONDUCTOR MFG19 citations80

US5843600ADec 1, 1998

Use of sub divided pattern for alignment mark recovery after inter-level dielectric planarization

TAIWAN SEMICONDUCTOR MFG7 citations71

US6396567B1May 28, 2002

Method and apparatus for controlling the dose of radiations applied to a semiconductor wafer during photolithography

TAIWAN SEMICONDUCTOR MFG10 citations70

US5902707AMay 11, 1999

Mask containing alignment mark protection pattern

TAIWAN SEMICONDUCTOR MFG1 citations50

UNITED MICROELECTRONICS CORP

2 patents

US7344963B2Mar 18, 2008

Method of reducing charging damage to integrated circuits during semiconductor manufacturing

UNITED MICROELECTRONICS CORP0 citations47

US7537865B2May 26, 2009

Method of adjusting size of photomask pattern

UNITED MICROELECTRONICS CORP0 citations37