Inventor
QUILES EFRAIN
US8 patents
⚠️ This page may combine multiple inventors who share the name “QUILES EFRAIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
5 patentsUS6320736B1Nov 20, 2001
Chuck having pressurized zones of heat transfer gas
APPLIED MATERIALS INC122 citations98
US6015465AJan 18, 2000
Temperature control system for semiconductor process chamber
APPLIED MATERIALS INC743 citations97
US6562189B1May 13, 2003
Plasma reactor with a tri-magnet plasma confinement apparatus
APPLIED MATERIALS INC69 citations96
US7833351B2Nov 16, 2010
Batch processing platform for ALD and CVD
APPLIED MATERIALS INC12 citations82
US10665476B2May 26, 2020
Substrate processing system, valve assembly, and processing method
APPLIED MATERIALS INC2 citations71