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Inventor
BABU SURYADEVARA
US
5 patents
⚠️ This page may combine multiple inventors who share the name “BABU SURYADEVARA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CHEMPOWER CORP
3 patents
US11545365B2
Jan 3, 2023
Chemical planarization
CHEMPOWER CORP
5 citations
71
US12593637B2
Mar 31, 2026
Chemical planarization
CHEMPOWER CORP
0 citations
48
US12500088B2
Dec 16, 2025
Tools for chemical planarization
CHEMPOWER CORP
0 citations
48
FERRO CORP
2 patents
US6702954B1
Mar 9, 2004
Chemical-mechanical polishing slurry and method
FERRO CORP
32 citations
91
US7101800B2
Sep 5, 2006
Chemical-mechanical polishing slurry and method
FERRO CORP
11 citations
82