Inventor
YI JINGANG
US6 patents
⚠️ This page may combine multiple inventors who share the name “YI JINGANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
4 patentsUS7001243B1Feb 21, 2006
Neural network control of chemical mechanical planarization
LAM RES CORP76 citations96
US6930782B1Aug 16, 2005
End point detection with imaging matching in semiconductor processing
LAM RES CORP56 citations95
US6931330B1Aug 16, 2005
Methods for monitoring and controlling chemical mechanical planarization
LAM RES CORP23 citations91
US7153182B1Dec 26, 2006
System and method for in situ characterization and maintenance of polishing pad smoothness in chemical mechanical polishing
LAM RES CORP13 citations78