Inventor
KOEHLER JESS
DE11 patents
⚠️ This page may combine multiple inventors who share the name “KOEHLER JESS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT AG
4 patentsUS7714983B2May 11, 2010
Illumination system for a microlithography projection exposure installation
ZEISS CARL SMT AG38 citations92
US6864960B2Mar 8, 2005
Zoom system for an illumination device
ZEISS CARL SMT AG14 citations83
US6900946B2May 31, 2005
Zoom system, in particular, a zoom system for an illumination device of a microlithographic projection system
ZEISS CARL SMT AG12 citations82
US7027235B2Apr 11, 2006
Optical system for providing a useful light beam influenced by polarization
ZEISS CARL SMT AG7 citations72
ZEISS STIFTUNG
3 patentsUS6583937B1Jun 24, 2003
Illuminating system of a microlithographic projection exposure arrangement
ZEISS STIFTUNG104 citations97
US6597511B2Jul 22, 2003
Microlithographic illuminating system and microlithographic projection exposure arrangement incorporating said system
ZEISS STIFTUNG2 citations62
US6683728B2Jan 27, 2004
Illumination system with reduced energy loading
ZEISS STIFTUNG2 citations59