Inventor
KRUIJSWIJK STEFAN GEERTE
NL11 patents
⚠️ This page may combine multiple inventors who share the name “KRUIJSWIJK STEFAN GEERTE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
9 patentsUS7002667B2Feb 21, 2006
Lithographic apparatus with alignment subsystem, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV15 citations82
US7403259B2Jul 22, 2008
Lithographic processing cell, lithographic apparatus, track and device manufacturing method
ASML NETHERLANDS BV7 citations72
US6995831B2Feb 7, 2006
Lithographic apparatus with alignment subsystem, device manufacturing method, using alignment, and alignment structure
ASML NETHERLANDS BV8 citations72
US7230675B2Jun 12, 2007
Lithographic apparatus, device manufacturing method and device manufactured therewith
ASML NETHERLANDS BV2 citations62
US7679715B2Mar 16, 2010
Lithographic processing cell, lithographic apparatus, track and device manufacturing method
ASML NETHERLANDS BV4 citations61
US7646468B2Jan 12, 2010
Lithographic processing cell and device manufacturing method
ASML NETHERLANDS BV0 citations50
US7297911B2Nov 20, 2007
Lithographic apparatus, illumination system, illumination controller and control method
ASML NETHERLANDS BV0 citations49
US7616291B2Nov 10, 2009
Lithographic processing cell and device manufacturing method
ASML NETHERLANDS BV0 citations41
US7224440B2May 29, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations41