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Inventor
LIOU PEI-YIN
TW
2 patents
⚠️ This page may combine multiple inventors who share the name “LIOU PEI-YIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
1 patent
US9613854B2
Apr 4, 2017
Method and apparatus for back end of line semiconductor device processing
TAIWAN SEMICONDUCTOR MFG CO LTD
6 citations
82
TAIWAN SEMICONDUCTOR MFG
1 patent
US9142505B2
Sep 22, 2015
Method and apparatus for back end of line semiconductor device processing
TAIWAN SEMICONDUCTOR MFG
9 citations
82