Inventor

TAKEDA SHINSUKE

JP4 patents

⚠️ This page may combine multiple inventors who share the name “TAKEDA SHINSUKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NIKON CORP

2 patents

US9322788B2Apr 26, 2016

Surface inspection apparatus, method for inspecting surface, exposure system, and method for producing semiconductor device

NIKON CORP0 citations48

US10571412B2Feb 25, 2020

X-ray apparatus and structure production method

NIKON CORP0 citations47

FUKAZAWA KAZUHIKO

1 patent

US9240356B2Jan 19, 2016

Surface inspection apparatus, method for inspecting surface, exposure system, and method for producing semiconductor device

FUKAZAWA KAZUHIKO1 citations58

MITSUBISHI HEAVY IND LTD

1 patent

US10647452B2May 12, 2020

Ablator, re-entry vehicle and method of manufacturing them

MITSUBISHI HEAVY IND LTD0 citations44