Inventor
GONDAI TADASHI
JP8 patents
⚠️ This page may combine multiple inventors who share the name “GONDAI TADASHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
6 patentsUS9875881B2Jan 23, 2018
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD20 citations91
US8904957B2Dec 9, 2014
Plasma processor and plasma processing method
TOKYO ELECTRON LTD12 citations91
US9728381B2Aug 8, 2017
Plasma processor and plasma processing method
TOKYO ELECTRON LTD4 citations83
US9437402B2Sep 6, 2016
Plasma processor and plasma processing method
TOKYO ELECTRON LTD11 citations83
US10615005B2Apr 7, 2020
Plasma generating method
TOKYO ELECTRON LTD1 citations61
US7569154B2Aug 4, 2009
Plasma processing method, plasma processing apparatus and computer storage medium
TOKYO ELECTRON LTD1 citations50