Inventor
CHIA BONNIE T
US5 patents
Patents
5 patentsUS10892180B2Jan 12, 2021
Lift pin assembly
APPLIED MATERIALS INC16 citations82
US9865437B2Jan 9, 2018
High conductance process kit
APPLIED MATERIALS INC8 citations82
US10763086B2Sep 1, 2020
High conductance process kit
APPLIED MATERIALS INC1 citations60
US9147558B2Sep 29, 2015
Finned shutter disk for a substrate process chamber
APPLIED MATERIALS INC2 citations59
US11031273B2Jun 8, 2021
Physical vapor deposition (PVD) electrostatic chuck with improved thermal coupling for temperature sensitive processes
APPLIED MATERIALS INC0 citations49