Inventor
SAITO TAKEHISA
JP9 patents
Patents
9 patentsUS11832373B2Nov 28, 2023
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations59
US11470712B2Oct 11, 2022
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations59
US12518947B2Jan 6, 2026
Plasma processing apparatus and plasma processing coil
TOKYO ELECTRON LTD0 citations50
US12494344B2Dec 9, 2025
Antenna for inductively coupled plasma excitation, antenna unit for inductively coupled plasma excitation, and plasma processing apparatus
TOKYO ELECTRON LTD0 citations50
US12340975B2Jun 24, 2025
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations50
US9543191B2Jan 10, 2017
Wiring structure having interlayer insulating film and wiring line without a barrier layer between
TOKYO ELECTRON LTD0 citations46
US9765430B2Sep 19, 2017
Plasma processing apparatus and film formation method
TOKYO ELECTRON LTD0 citations39
US9378942B2Jun 28, 2016
Deposition method and deposition apparatus
TOKYO ELECTRON LTD0 citations37
US9343270B2May 17, 2016
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations37