Inventor

INOKUCHI ATSUTOSHI

JP7 patents

⚠️ This page may combine multiple inventors who share the name “INOKUCHI ATSUTOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

3 patents

US9767994B2Sep 19, 2017

Shower plate sintered integrally with gas release hole member and method for manufacturing the same

TOKYO ELECTRON LTD0 citations51

US11495439B2Nov 8, 2022

Plasma processing apparatus

TOKYO ELECTRON LTD0 citations44

US9378942B2Jun 28, 2016

Deposition method and deposition apparatus

TOKYO ELECTRON LTD0 citations37

OHMI TADAHIRO

2 patents

US8592810B2Nov 26, 2013

Thin film, method of forming the same, and semiconductor light-emitting element comprising the thin film

OHMI TADAHIRO3 citations60

US8188468B2May 29, 2012

Compound-type thin film, method of forming the same, and electronic device using the same

OHMI TADAHIRO3 citations58

OKESAKU MASAHIRO

1 patent

US8915999B2Dec 23, 2014

Shower plate sintered integrally with gas release hole member and method for manufacturing the same

OKESAKU MASAHIRO4 citations70

UNIV TOHOKU NAT UNIV CORP

1 patent

US7923819B2Apr 12, 2011

Interlayer insulating film, wiring structure and electronic device and methods of manufacturing the same

UNIV TOHOKU NAT UNIV CORP1 citations51