Inventor

FOMENKOV IGOR

US4 patents

⚠️ This page may combine multiple inventors who share the name “FOMENKOV IGOR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CYMER INC

1 patent

US5978391ANov 2, 1999

Wavelength reference for excimer laser

CYMER INC123 citations97

CYMER LASER TECH

1 patent

US5450207ASep 12, 1995

Method and apparatus for calibrating a laser wavelength control mechanism

CYMER LASER TECH116 citations94

GRAHAM MATTHEW

1 patent

US8993976B2Mar 31, 2015

Energy sensors for light beam alignment

GRAHAM MATTHEW4 citations62

ASML NETHERLANDS BV

1 patent

US9148941B2Sep 29, 2015

Thermal monitor for an extreme ultraviolet light source

ASML NETHERLANDS BV1 citations48