Inventor
KAWASE AKIHIRO
JP4 patents
Patents
4 patentsUS6852009B2Feb 8, 2005
Polishing composition and polishing method employing it
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Edge polishing composition
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US7481950B2Jan 27, 2009
Polishing composition and polishing method using the same
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US7481949B2Jan 27, 2009
Polishing composition and rinsing composition
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