Inventor · disambiguated record
Dianne L. Sundling
Also filed as: SUNDLING DIANNE L
3 granted patents·25 citations·filing 1999–2004
70Inventor score
Files withIBM3
Top patents by PatentIndex Score
3 records- 0167US6944578B2Contact hole profile and line edge width metrology for critical image control and feedback of lithographic focusIBM·Filed 2004·Granted Sep 13, 2005·9 cites·6 claims
- 0265US6917901B2Contact hole profile and line edge width metrology for critical image control and feedback of lithographic focusIBM·Filed 2002·Granted Jul 12, 2005·8 cites·26 claims
- 0335US6303416B1Method to reduce plasma etch flutingIBM·Filed 1999·Granted Oct 16, 2001·8 cites·6 claims
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