Inventor
ANDO MICHIAKI
JP3 patents
Patents
3 patentsUS6786944B2Sep 7, 2004
Aqueous dispersion for chemical mechanical polishing
JSR CORP22 citations91
US6660394B1Dec 9, 2003
Coating composition and hardened film obtained therefrom
JSR CORP30 citations91
US6740629B2May 25, 2004
Composition for washing a polishing pad and method for washing a polishing pad
JSR CORP17 citations82