Inventor

BISSON JOHN C

US2 patents

Patents

2 patents

US6635506B2Oct 21, 2003

Method of fabricating micro-electromechanical switches on CMOS compatible substrates

IBM155 citations98

US6798029B2Sep 28, 2004

Method of fabricating micro-electromechanical switches on CMOS compatible substrates

IBM28 citations92