Inventor

LEE SEUNG-MAHN

US2 patents

⚠️ This page may combine multiple inventors who share the name “LEE SEUNG-MAHN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

UNIV FLORIDA

1 patent

US6821309B2Nov 23, 2004

Chemical-mechanical polishing slurry for polishing of copper or silver films

UNIV FLORIDA39 citations89

SAMSUNG ELECTRONICS CO LTD

1 patent

US7737038B2Jun 15, 2010

Method of fabricating semiconductor device including planarizing conductive layer using parameters of pattern density and depth of trenches

SAMSUNG ELECTRONICS CO LTD48 citations88