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Inventor
ROCKTAESCHEL MARTIN
DE
2 patents
⚠️ This page may combine multiple inventors who share the name “ROCKTAESCHEL MARTIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
1 patent
US11360293B2
Jun 14, 2022
Catadioptric projection lens and method for producing same
ZEISS CARL SMT GMBH
0 citations
42
ROCKTAESCHEL MARTIN
1 patent
US9568845B2
Feb 14, 2017
Mirror for use in a microlithography projection exposure apparatus
ROCKTAESCHEL MARTIN
0 citations
30