Inventor

MIGURA SASCHA

DE8 patents

⚠️ This page may combine multiple inventors who share the name “MIGURA SASCHA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CHAN DANNY

2 patents

US8279404B2Oct 2, 2012

Projection objective having mirror elements with reflective coatings

CHAN DANNY12 citations82

US9013678B2Apr 21, 2015

Projection objective having mirror elements with reflective coatings

CHAN DANNY2 citations60

ZEISS CARL SMT GMBH

1 patent

US9291751B2Mar 22, 2016

Imaging optical unit and projection exposure apparatus for projection lithography comprising such an imaging optical unit

ZEISS CARL SMT GMBH0 citations50

KAMENOV VLADIMIR

1 patent

US8486590B2Jul 16, 2013

Reflective mask for EUV lithography

KAMENOV VLADIMIR1 citations45

DODOC AURELIAN

1 patent

US9188771B2Nov 17, 2015

Reflective optical imaging system

DODOC AURELIAN0 citations40

ASML NETHERLANDS BV

1 patent

US10558126B2Feb 11, 2020

Lithographic apparatus and method

ASML NETHERLANDS BV0 citations39

MUELLENDER STEPHAN

1 patent

US9494718B2Nov 15, 2016

Mirror for the EUV wavelength range, substrate for such a mirror, projection objective for microlithography comprising such a mirror or such a substrate, and projection exposure apparatus for microlithography comprising such a projection objective

MUELLENDER STEPHAN0 citations31

ROCKTAESCHEL MARTIN

1 patent

US9568845B2Feb 14, 2017

Mirror for use in a microlithography projection exposure apparatus

ROCKTAESCHEL MARTIN0 citations30