Inventor
HANAWA TOSHIKAZU
JP10 patents
Patents
10 patentsUS10043884B2Aug 7, 2018
Manufacturing method for semiconductor device
RENESAS ELECTRONICS CORP0 citations48
US9935023B2Apr 3, 2018
Methods for manufacturing semiconductor device and for detecting end point of dry etching
RENESAS ELECTRONICS CORP0 citations48
US9761685B2Sep 12, 2017
Manufacturing method for semiconductor device
RENESAS ELECTRONICS CORP1 citations48
US9711423B2Jul 18, 2017
Methods for manufacturing semiconductor device and for detecting end point of dry etching
RENESAS ELECTRONICS CORP0 citations48
US11594489B2Feb 28, 2023
Semiconductor device and method of manufacturing the same
RENESAS ELECTRONICS CORP0 citations47
US10224214B2Mar 5, 2019
Manufacturing method of semiconductor device
RENESAS ELECTRONICS CORP0 citations47
US9818620B2Nov 14, 2017
Manufacturing method of semiconductor device
RENESAS ELECTRONICS CORP0 citations47
US9666445B2May 30, 2017
Manufacturing method of semiconductor device
RENESAS ELECTRONICS CORP0 citations47
US9595468B2Mar 14, 2017
Method of manufacturing semiconductor device that uses treatment to enhance hydrophilicity of spin coated insulating film
RENESAS ELECTRONICS CORP0 citations45
US10872813B2Dec 22, 2020
Method of manufacturing semiconductor device
RENESAS ELECTRONICS CORP0 citations33