Inventor

UMSTADTER KARL R

US4 patents

⚠️ This page may combine multiple inventors who share the name “UMSTADTER KARL R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR CORP

2 patents

US9155180B1Oct 6, 2015

System and method of simultaneously fueling and mitigating debris for a plasma-based illumination source

KLA TENCOR CORP2 citations56

US9156068B2Oct 13, 2015

Methods and apparatus for cleaning objects in a chamber of an optical instrument by generating reactive ions using photon radiation

KLA TENCOR CORP0 citations44

UMSTADTER KARL R

1 patent

US9268031B2Feb 23, 2016

Advanced debris mitigation of EUV light source

UMSTADTER KARL R5 citations61

WACK DANIEL

1 patent

US8917432B2Dec 23, 2014

Multiplexing EUV sources in reticle inspection

WACK DANIEL2 citations51