Inventor
NAWATA RYO
JP18 patents
⚠️ This page may combine multiple inventors who share the name “NAWATA RYO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
17 patentsUS7133115B2Nov 7, 2006
Positioning device, exposure apparatus using the positioning device, and device production method
CANON KK26 citations92
US7221463B2May 22, 2007
Positioning apparatus, exposure apparatus, and method for producing device
CANON KK13 citations84
US9665108B2May 30, 2017
Vibration reduction apparatus, lithography apparatus, and method of manufacturing article
CANON KK7 citations83
US11584063B2Feb 21, 2023
Imprint method, imprint apparatus, and article manufacturing method
CANON KK4 citations73
US7821726B2Oct 26, 2010
Optical element positioning apparatus, projection optical system and exposure apparatus
CANON KK3 citations62
US11498260B2Nov 15, 2022
Imprint method and method for manufacturing article
CANON KK0 citations61
US7733462B2Jun 8, 2010
Exposure apparatus and exposure method
CANON KK2 citations61
US7643150B2Jan 5, 2010
Optical apparatus, exposure apparatus, and device manufacturing method
CANON KK2 citations61
US12246482B2Mar 11, 2025
Control apparatus, imprint apparatus, and method of manufacturing article
CANON KK0 citations57
US7948695B2May 24, 2011
Optical element positioning apparatus, projection optical system and exposure apparatus
CANON KK1 citations52
US11714352B2Aug 1, 2023
Imprinting apparatus, imprinting method, method for producing article, substrate, and mold
CANON KK0 citations51
US10209633B2Feb 19, 2019
Vibration control apparatus, lithography apparatus, and method of manufacturing article
CANON KK0 citations51
US9671704B2Jun 6, 2017
Vibration reduction apparatus, lithography apparatus and method of manufacturing article
CANON KK0 citations51
US7589911B2Sep 15, 2009
Technique for positioning optical system element
CANON KK0 citations51
US11815861B2Nov 14, 2023
Feedback control device that suppresses disturbance vibration using machine learning, article manufacturing method, and feedback control method
CANON KK0 citations46
US12147164B2Nov 19, 2024
Motion control apparatus, lithography apparatus, planarization apparatus, processing apparatus, and article manufacturing method
CANON KK0 citations45
US9599185B2Mar 21, 2017
Vibration control apparatus, lithography apparatus, and article manufacturing method
CANON KK0 citations40