Inventor
HSU YU-HSIN
TW6 patents
Patents
6 patentsUS11209736B2Dec 28, 2021
Method for cleaning substrate, method for manufacturing photomask and method for cleaning photomask
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations82
US11480869B2Oct 25, 2022
Photomask with enhanced contamination control and method of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12282260B2Apr 22, 2025
Method for cleaning substrate, method for manufacturing photomask and method for cleaning photomask
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12087579B2Sep 10, 2024
Method for forming semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11036129B2Jun 15, 2021
Photomask and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US10101651B1Oct 16, 2018
Photo mask assembly and optical apparatus including the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50