Inventor
JIN HADONG
KR3 patents
Patents
3 patentsUS11282679B2Mar 22, 2022
Plasma control apparatus and plasma processing system including the same
SAMSUNG ELECTRONICS CO LTD2 citations67
US12550672B2Feb 10, 2026
Susceptor and manufacturing method therefor
SAMSUNG ELECTRONICS CO LTD0 citations56
US12424412B2Sep 23, 2025
Apparatus for providing RF power and operating method thereof
SAMSUNG ELECTRONICS CO LTD0 citations45