Inventor
KIM NAMKYUN
KR5 patents
Patents
5 patentsUS12476089B2Nov 18, 2025
Plasma processing apparatus
SAMSUNG ELECTRONICS CO LTD0 citations55
US11996275B2May 28, 2024
Device for radical diagnostic in plasma processing chamber, radical diagnostic system having the same, and operating method thereof
SAMSUNG ELECTRONICS CO LTD0 citations49
US12424412B2Sep 23, 2025
Apparatus for providing RF power and operating method thereof
SAMSUNG ELECTRONICS CO LTD0 citations45
US12222362B2Feb 11, 2025
Method of measuring parameters of plasma, apparatus for measuring parameters of plasma, plasma processing system, and method of processing wafer
SAMSUNG ELECTRONICS CO LTD0 citations45
US12183555B2Dec 31, 2024
Substrate processing apparatus and method of manufacturing semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD0 citations43