Inventor
HAMILTON SHAWN M
US9 patents
⚠️ This page may combine multiple inventors who share the name “HAMILTON SHAWN M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
5 patentsUS10023959B2Jul 17, 2018
Anti-transient showerhead
LAM RES CORP20 citations92
US10494717B2Dec 3, 2019
Anti-transient showerhead
LAM RES CORP13 citations82
US10388546B2Aug 20, 2019
Apparatus for UV flowable dielectric
LAM RES CORP2 citations70
US11270896B2Mar 8, 2022
Apparatus for UV flowable dielectric
LAM RES CORP1 citations60
US10107490B2Oct 23, 2018
Configurable liquid precursor vaporizer
LAM RES CORP0 citations39