Inventor
TE NIJENHUIS HARALD
US10 patents
⚠️ This page may combine multiple inventors who share the name “TE NIJENHUIS HARALD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVELLUS SYSTEMS INC
3 patentsUS7981763B1Jul 19, 2011
Atomic layer removal for high aspect ratio gapfill
NOVELLUS SYSTEMS INC59 citations97
US9728380B2Aug 8, 2017
Dual-plenum showerhead with interleaved plenum sub-volumes
NOVELLUS SYSTEMS INC11 citations81
US6541400B1Apr 1, 2003
Process for CVD deposition of fluorinated silicon glass layer on semiconductor wafer
NOVELLUS SYSTEMS INC13 citations81
LAM RES CORP
3 patentsUS9847222B2Dec 19, 2017
Treatment for flowable dielectric deposition on substrate surfaces
LAM RES CORP15 citations83
US12227842B2Feb 18, 2025
Vapor accumulator for corrosive gases with purging
LAM RES CORP0 citations50
US10107490B2Oct 23, 2018
Configurable liquid precursor vaporizer
LAM RES CORP0 citations39