Inventor

LORELLI JEFFREY E

US3 patents

⚠️ This page may combine multiple inventors who share the name “LORELLI JEFFREY E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NOVELLUS SYSTEMS INC

1 patent

US9728380B2Aug 8, 2017

Dual-plenum showerhead with interleaved plenum sub-volumes

NOVELLUS SYSTEMS INC11 citations81

MOHN JONATHAN D

1 patent

US9121097B2Sep 1, 2015

Variable showerhead flow by varying internal baffle conductance

MOHN JONATHAN D10 citations79

LAM RES CORP

1 patent

US10107490B2Oct 23, 2018

Configurable liquid precursor vaporizer

LAM RES CORP0 citations39