Inventor
MADRIGAL KEVIN
US6 patents
⚠️ This page may combine multiple inventors who share the name “MADRIGAL KEVIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
3 patentsUS9284644B2Mar 15, 2016
Apparatus and method for improving wafer uniformity
LAM RES CORP1 citations45
US10107490B2Oct 23, 2018
Configurable liquid precursor vaporizer
LAM RES CORP0 citations39
US9863041B2Jan 9, 2018
Internally heated porous filter for defect reduction with liquid or solid precursors
LAM RES CORP0 citations39