Inventor
MERKEL WOLFGANG
8 patents
⚠️ This page may combine multiple inventors who share the name “MERKEL WOLFGANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
5 patentsUS11099484B2Aug 24, 2021
Method for repairing reflective optical elements for EUV lithography
ZEISS CARL SMT GMBH0 citations59
US11231658B2Jan 25, 2022
Arrangement for an EUV lithography apparatus
ZEISS CARL SMT GMBH0 citations49
US10578974B2Mar 3, 2020
Optical element, in particular for a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH0 citations48
US10503075B2Dec 10, 2019
EUV Collector
ZEISS CARL SMT GMBH0 citations37
US10146048B2Dec 4, 2018
Optical assembly, projection system, metrology system and EUV lithography apparatus
ZEISS CARL SMT GMBH0 citations35