Inventor
COOK JOEL M
US15 patents
⚠️ This page may combine multiple inventors who share the name “COOK JOEL M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
11 patentsUS5863376AJan 26, 1999
Temperature controlling method and apparatus for a plasma processing chamber
LAM RES CORP281 citations99
US6255221B1Jul 3, 2001
Methods for running a high density plasma etcher to achieve reduced transistor device damage
LAM RES CORP369 citations98
US6306244B1Oct 23, 2001
Apparatus for reducing polymer deposition on substrate support
LAM RES CORP28 citations92
US6028286AFeb 22, 2000
Method for igniting a plasma inside a plasma processing reactor
LAM RES CORP22 citations92
US6165910ADec 26, 2000
Self-aligned contacts for semiconductor device
LAM RES CORP20 citations91
US5783496AJul 21, 1998
Methods and apparatus for etching self-aligned contacts
LAM RES CORP33 citations90
US6939796B2Sep 6, 2005
System, method and apparatus for improved global dual-damascene planarization
LAM RES CORP14 citations83
US7875554B2Jan 25, 2011
Method for electroless depositing a material on a surface of a wafer
LAM RES CORP1 citations62
US7192875B1Mar 20, 2007
Processes for treating morphologically-modified silicon electrode surfaces using gas-phase interhalogens
LAM RES CORP5 citations62
US6821899B2Nov 23, 2004
System, method and apparatus for improved local dual-damascene planarization
LAM RES CORP6 citations62
US7358186B2Apr 15, 2008
Method and apparatus for material deposition in semiconductor fabrication
LAM RES CORP1 citations51