Inventor

YAMAGUCHI KAZUNOBU

JP3 patents

Patents

3 patents

US5415691AMay 16, 1995

Solution coating apparatus

TOKYO OHKA KOGYO CO LTD27 citations90

US5660634AAug 26, 1997

Rotary-cup liquid supply device

TOKYO OHKA KOGYO CO LTD16 citations71

US6090216AJul 18, 2000

Cleaning device and cleaning method for applicator nozzle

TOKYO OHKA KOGYO CO LTD6 citations60