Inventor
FUJIYAMA SHIGEMI
JP9 patents
Patents
9 patentsUS5349978ASep 27, 1994
Cleaning device for cleaning planar workpiece
TOKYO OHKA KOGYO CO LTD140 citations95
US5439519AAug 8, 1995
Solution applying apparatus
TOKYO OHKA KOGYO CO LTD58 citations94
US5415691AMay 16, 1995
Solution coating apparatus
TOKYO OHKA KOGYO CO LTD27 citations90
US6247579B1Jun 19, 2001
Substrate transfer apparatus and method of substrate transfer
TOKYO OHKA KOGYO CO LTD25 citations84
US6436472B1Aug 20, 2002
Method of applying a coating solution to a substrate surface using a rotary coater
TOKYO OHKA KOGYO CO LTD10 citations73
US5785759AJul 28, 1998
Rotating cup type liquid supply device
TOKYO OHKA KOGYO CO LTD7 citations73
US5660634AAug 26, 1997
Rotary-cup liquid supply device
TOKYO OHKA KOGYO CO LTD16 citations71
US6090216AJul 18, 2000
Cleaning device and cleaning method for applicator nozzle
TOKYO OHKA KOGYO CO LTD6 citations60
US6761930B2Jul 13, 2004
Method of coating solution on substrate surface using a slit nozzle
TOKYO OHKA KOGYO CO LTD1 citations51