Inventor
AOYAMA TOHRU
JP6 patents
⚠️ This page may combine multiple inventors who share the name “AOYAMA TOHRU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NEC CORP
4 patentsUS5951774ASep 14, 1999
Cold-wall operated vapor-phase growth system
NEC CORP22 citations92
US6281097B1Aug 28, 2001
Method of fabricating a semiconductor device having epitaxial layer
NEC CORP17 citations81
US6228166B1May 8, 2001
Method for boron contamination reduction in IC fabrication
NEC CORP12 citations72
US6150221ANov 21, 2000
Semiconductor device and method for manufacturing same
NEC CORP14 citations71