Inventor
VELTROP ROBERT G
US8 patents
⚠️ This page may combine multiple inventors who share the name “VELTROP ROBERT G”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
6 patentsUS6583572B2Jun 24, 2003
Inductive plasma processor including current sensor for plasma excitation coil
LAM RES CORP458 citations98
US6164241ADec 26, 2000
Multiple coil antenna for inductively-coupled plasma generation systems
LAM RES CORP225 citations98
US6463875B1Oct 15, 2002
Multiple coil antenna for inductively-coupled plasma generation systems
LAM RES CORP110 citations97
US6155199ADec 5, 2000
Parallel-antenna transformer-coupled plasma generation system
LAM RES CORP91 citations97
US7096819B2Aug 29, 2006
Inductive plasma processor having coil with plural windings and method of controlling plasma density
LAM RES CORP47 citations92
US6527912B2Mar 4, 2003
Stacked RF excitation coil for inductive plasma processor
LAM RES CORP7 citations73