P

Inventor

BONDESTAM NIKLAS

FI8 patents
⚠️ This page may combine multiple inventors who share the name “BONDESTAM NIKLAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASM INT

4 patents
US6939579B2Sep 6, 2005

ALD reactor and method with controlled wall temperature

ASM INT372 citations98
US7833352B2Nov 16, 2010

Apparatus for fabrication of thin films

ASM INT14 citations91
US7063981B2Jun 20, 2006

Active pulse monitoring in a chemical reactor

ASM INT21 citations91
US6779378B2Aug 24, 2004

Method of monitoring evaporation rate of source material in a container

ASM INT19 citations91

ASM MICROCHEMISTRY OY

2 patents
US6562140B1May 13, 2003

Apparatus for fabrication of thin films

ASM MICROCHEMISTRY OY107 citations97
US6579374B2Jun 17, 2003

Apparatus for fabrication of thin films

ASM MICROCHEMISTRY OY80 citations96

ASM MICROCHEMISTRY LTD

1 patent
US6630030B1Oct 7, 2003

Method and apparatus for growing thin films

ASM MICROCHEMISTRY LTD430 citations97

ASM ITERNAT N V

1 patent
US7374941B2May 20, 2008

Active reactant vapor pulse monitoring in a chemical reactor

ASM ITERNAT N V10 citations78