Inventor
KESAELAE JANNE
FI4 patents
⚠️ This page may combine multiple inventors who share the name “KESAELAE JANNE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM MICROCHEMISTRY OY
3 patentsUS6562140B1May 13, 2003
Apparatus for fabrication of thin films
ASM MICROCHEMISTRY OY107 citations97
US6579374B2Jun 17, 2003
Apparatus for fabrication of thin films
ASM MICROCHEMISTRY OY80 citations96
US6699524B2Mar 2, 2004
Method and apparatus for feeding gas phase reactant into a reaction chamber
ASM MICROCHEMISTRY OY26 citations89