Inventor

KOZAWA SEIJI

JP5 patents

⚠️ This page may combine multiple inventors who share the name “KOZAWA SEIJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

4 patents

US6814809B2Nov 9, 2004

Coating and developing apparatus and pattern forming method

TOKYO ELECTRON LTD16 citations82

US6643564B2Nov 4, 2003

Method of determining retreat permission position of carrier arm and teaching device thereof

TOKYO ELECTRON LTD13 citations82

US6050389AApr 18, 2000

Carrier apparatus with more than one carrier belts and processing apparatus therewith

TOKYO ELECTRON LTD16 citations82

US6332751B1Dec 25, 2001

Transfer device centering method and substrate processing apparatus

TOKYO ELECTRON LTD11 citations72

NAKAMURA NAOTO

1 patent

US8812266B2Aug 19, 2014

Abnormality determination system and abnormality determination method for processing apparatus

NAKAMURA NAOTO0 citations36