Inventor

SOGO TOMOHIKO

JP2 patents

Patents

2 patents

US7164455B2Jan 16, 2007

Device, manufacturing method thereof, and electronic instrument with the device

SEIKO EPSON CORP16 citations81

US7070701B2Jul 4, 2006

Manufacturing method of fine structure, optical element, integrated circuit, and electronic instrument

SEIKO EPSON CORP7 citations71