Inventor
KUCHIMACHI KAZUHIRO
JP9 patents
Patents
9 patentsUS5886863AMar 23, 1999
Wafer support member
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US6133557AOct 17, 2000
Wafer holding member
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US5413360AMay 9, 1995
Electrostatic chuck
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US7312974B2Dec 25, 2007
Electrostatic chuck
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US5677253AOct 14, 1997
Wafer holding member
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US11685695B2Jun 27, 2023
Aluminum nitride-based sintered compact and semiconductor holding device
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US11116046B2Sep 7, 2021
Heater
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US10418265B2Sep 17, 2019
Sample holder and plasma etching apparatus using same
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US7956277B2Jun 7, 2011
Thermoelectric module
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